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| 类别 | 子类别 | 库存号 | 名称 | 料号 | 规格/描述 |
| GASONICS | A1000 | A78-005-01 | O-RING,SILICONE chamber upper Inner | ||
| GASONICS | A1000 | A78-006-01 | O-RING,SILICONE chamber upper Outer | ||
| GASONICS | A1000 | A78-007-01 | O-Ring,SILICONE chamber Bottom Cover Plate | ||
| GASONICS | A1000 | A78-008-01 | O-Ring,SILICONE chamber Bottom quartz | ||
| GASONICS | A1000 | A78-009-01 | o-ring chemraz 513 CHAMBER door | ||
| GASONICS | A1000 | A78-014-01 | O-Ring, Silicone,EOP,Outer | ||
| GASONICS | A1000 | A78-016-01 | O-Ring, Silicone, EOP,Inner | ||
| GASONICS | A1000 | A78-034-01 | o-ring chemraz 505 Plasma Tube Bottom | ||
| GASONICS | A1000 | A78-036-01 | o-ring 9-010 chemraz 505 Plasma Tube Top | ||
| GASONICS | A1000 | A06-010-01 | PLASMA TUBE FOR GASONICS A1000 ASHER | ||
| GASONICS | A1000 | A39-001-01 | USHIO LAMP 1000W,12OV, J120V-1000WB,加热灯120V | ||
| GASONICS | A1000 | A39-006-01 | USHIO LAMP 1000W,225V, J225V-1000WB,A1000 加热灯225V | ||
| GASONICS | A1000 | A06-002-01 | 腔体底部石英圆盘 | ||
| GASONICS | A1000 | A06-005-01 | SHOWER HEAD，QUARTZ | ||
| GASONICS | A1000 | A06-012-01 | QUARTZ，DIFFUSION DISK | ||
| GASONICS | A1000 | A06-001-01 | CHAMBER WINDOW,VENTED,A1000腔体带孔石英件 |
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