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PECVD
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| 类别 | 子类别 | 库存号 | 名称 | 料号 | 规格/描述 |
| NOVELLUS | Concept One | Showerhead | 16-033932-00 | Showerhead，Pinned，150mm | |
| NOVELLUS | Concept One | showerhead固定件 | 15-00043-02 | Adjuster，Ceramic，Gas Plate | |
| NOVELLUS | Concept One | showerhead固定件 | 15-00027-02 | Guide，Nozzle Adjuster | |
| NOVELLUS | Concept One | showerhead固定件（螺母） | 20-00212-00 | Nut，8-32 UNC-2B,Alum | |
| NOVELLUS | Concept One | showerhead固定件 | 15-00309-00 | Hanger，Nozzle，1.33"（150mm） | |
| NOVELLUS | Concept One | Feedthru套件（螺母） | 15-00229-00 | Nut，Hex，1/2-20，Alum | |
| NOVELLUS | Concept One | Feedthru套件（垫片） | 15-00686-00 | Washer，Feedthru。1/2"ID，Alum | |
| NOVELLUS | Concept One | Feedthru套件（密封圈） | 22-00021-01 | O-Ring，1.984"×0.139"，Buna | |
| NOVELLUS | Concept One | Feedthru套件（密封圈） | 22-00391-00 | O-Ring，0.864"×0.070"，Viton | |
| NOVELLUS | Concept One | Showerhead Feedthru | 15-00685-00 | Feedthru，3/8"O-Seal,UitraTorr | |
| NOVELLUS | Concept One | Feedthru套件（密封圈） | 22-00344-00 | O-Ring, 0.364"×0.070",Viton | |
| NOVELLUS | Concept One | 90°气体分配固定件（密封圈） | 22-00345-00 | O-Ring, 0.362"×0.103",Viton | |
| NOVELLUS | Concept One | 气体分配盘套件（密封圈） | 22-00239-00 | O-Ring, 5.984×0.139，Viton | |
| NOVELLUS | Concept One | 90°气体分配固定件（陶瓷管） | 15-11606-00 | Insulator，Gas Dist，Ceramic | |
| NOVELLUS | Concept One | 片叉弹片 | 17-00148-00 | Spring，Fork | |
| NOVELLUS | Concept One | spindle固定fork螺丝 镍 | 15-00698-00 | Screw,Fork | |
| NOVELLUS | Concept One | spindle固定螺丝 镍 | 15-00399-05 | Screw, 1.12LG, Top Spindle | |
| NOVELLUS | Concept One | spindle固定螺丝 镍 | 15-00399-04 | Screw, 1.02LG, Top Spindle | |
| NOVELLUS | Concept One | spindle螺丝垫片 镍 | 15-00386-00 | Washer，Flat, #10, Nickel | |
| NOVELLUS | Concept One | spindle螺丝垫片 镍 | 15-00721-00 | Washer, #8, Nickel | |
| NOVELLUS | Concept One | spindle螺丝保护冒 | 15-00951-00 | Cup, Screw Cover | |
| NOVELLUS | Concept One | 加热线长 | 16-00098-00 | Wire, Insulated, Ceramic Bead, Long | |
| NOVELLUS | Concept One | 加热线短 | 16-00092-00 | Wire, Insulated, Ceramic Bead, Short | |
| NOVELLUS | Concept One | 三角形铝片 | 17-00094-01 | Strap，LF Bias，Alum | |
| NOVELLUS | Concept One | 热盘 | 19-00155-01 | Heater Block Assy，Slotted，150mm | |
| NOVELLUS | Concept One | 工艺腔石英观察窗 | 15-032014-00 | Window, Quartz, Etched | |
| NOVELLUS | Concept One | Loadlock Chamber Door密封圈（小） | 22-00657-00 | O-ring, 7.975"×0.210", Kalrez | |
| NOVELLUS | Concept One | 工艺腔与LL腔连接处密封圈 | 22-00236-00 | O-ring, 7.45"×0.275", Viton, 150mm | |
| NOVELLUS | Concept One | 工艺腔观察窗密封圈 | 22-00234-00 | O-ring, 7.48"×0.139", Viton, 150mm | |
| NOVELLUS | Concept One | 热盘与加热线固定螺母 | 15-00385-00 | ||
| NOVELLUS | Concept One | 热盘与加热线固定螺丝 | 15-00457-00 | ||
| NOVELLUS | Concept One | 三角形铝片与热盘固定螺丝 | 15-00341-00 | ||
| NOVELLUS | Concept One | 三角形铝片与热盘固定螺丝垫片 | 20-00222-00 | ||
| NOVELLUS | Concept One | Flange，Keyed与spindle固定螺丝 | 15-00399-03 | ||
| NOVELLUS | Concept One | Clamp，spindle Hub Mount与热盘固定螺丝 | 15-00399-02 | ||
| NOVELLUS | Concept One | TEOS INJECTOR | 10-00424-00 | ||
| NOVELLUS | Concept One | 6"手臂 | 15-01049-00 | Paddle，Dimple，150mm | |
| NOVELLUS | Concept One | 6"手臂固定件 | 15-00486-00 | Bracket，Paddle，150mm | |
| NOVELLUS | Concept One | 加热Feedthru Feedthru Assy,Electrical组成 | 19-00056-00 | Feedthru Assy,Electrical | |
| NOVELLUS | Concept One | 加热feedthru螺帽保护套（镍） | 15-00311-00 | Nut，Cap，1/4-20，Ni | |
| NOVELLUS | Concept One | 片盒 | N/A | 定制 |
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